EDFAS - ISTFA User Groups

Nano-probing and EBIC/EBAC on large/packaged samples

  • 1.  Nano-probing and EBIC/EBAC on large/packaged samples

    Posted 02-09-2021 18:10
    Dear members,

    Following @Douglas Hunt​ 's presentation during the Users Group Series last week, I want to share a solution which can probably solve most of the challenges mentioned by Doug about in situ nano-probing and EBIC/EBAC on large or packaged samples.
    We have released an adaptor for our standard nano-probing solution, which provides space below the nanoprobers to accommodate large/tall samples.
    Different elevations are available to match most sample heights, to probe cross-sections, wafers, packaged samples, etc., in your SEM or dual beam.

    I am attaching a datasheet with more details, and two pictures as examples. I hope this will be helpful for the community. Feel free to get in touch or comment if you have any question.
    @Douglas Hunt, would this solve your problems?




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    Guillaume Boetsch
    Imina Technologies SA
    www.imina.ch
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