Posted By
Phil Kaszuba
04-23-2020 09:30
Found In
Egroup:
EDFAS Online Community
\
view thread
Hey Kyle, I have struggled with this problem for many years and have been unsuccessful in coming up with a wet or dry etch that selectively removes cobalt silicide. The method we use is to polish into the polysilicon layer using 0.05um alumina. You can use coloration under an optical microscope to know ...
|